Microstructure investigation of TSV copper film.
Autor: | Putra, W. N., Li, H. Y., Trigg, A. D., Gan, C. L. |
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Zdroj: | 2013 IEEE 63rd Electronic Components & Technology Conference; 2013, p1414-1419, 6p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Putra, W. N., Li, H. Y., Trigg, A. D., Gan, C. L. |
---|---|
Zdroj: | 2013 IEEE 63rd Electronic Components & Technology Conference; 2013, p1414-1419, 6p |
Databáze: | Complementary Index |
Externí odkaz: |