Piezoelectric MEMS devices and its application as bio-chemical sensors.
| Autor: | Lu, J., Sagawa, T., Zhang, L., Takagi, H., Wang, D.F., Itoh, T., Maeda, R. |
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| Zdroj: | 8th Annual IEEE International Conference on Nano/Micro Engineered & Molecular Systems; 2013, p163-166, 4p |
| Databáze: | Complementary Index |
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