Optimizing inspection recipe by using virtual inspector virtual analyzer and failure bitmap.
| Autor: | Jang, Roma, Ihm, Dongchul, Lee, Byoungho, Yong, Poh Boon, Simon, George, Wu, Jian |
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| Zdroj: | ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference; 2013, p262-264, 3p |
| Databáze: | Complementary Index |
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