Corrections to “Multifunction Thermopile Sensors Fabricated With a MEMS-Compatible Process”.

Autor:	Sin, Li-min, Pan, Tai-Tou, Tsai, Chun-Wei, Chou, Chia-feng, Hong, Jia-qi, Tsai, Jui-che
Předmět:	THERMOPILES DETECTORS MICROELECTROMECHANICAL systems SEMICONDUCTOR research
Zdroj:	IEEE Transactions on Semiconductor Manufacturing; Aug2013, Vol. 26 Issue 3, p430-430, 1p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu