Estimation of deflections by interferometry in a cantilever array and its optimization based on a two-scale model.

Autor:	Hui, H., Lenczner, M., Cogan, S., Meister, A., Favre, M., Overstolz, T., Couturier, R., Domas, S.
Zdroj:	2013 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems (EuroSimE); 2013, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu