Process monitoring of spin-valve GMR deposition.

Autor: Kools, J.C.S., Paranjpe, A.P., Schwartz, P.V., Bubber, R., Bergner, B., Kula, W., Rijks, Th. G. S. M.
Předmět:
Zdroj: IEEE Transactions on Magnetics; Jul98 Part 1 of 2, Vol. 34 Issue 4, p945, 3p, 1 Diagram, 2 Charts, 3 Graphs
Abstrakt: Presents a study which compared the conductance of a spin-valve giant magnetoresistance multilayered thin film deposition to numerical solutions for the Boltzmann equation. Application of sheet resistance measurements to process monitoring; Conclusions.
Databáze: Complementary Index