| Autor: |
Jody Corso, Alain, Zuppella, Paola, Barkusky, Frank, Mann, Klaus, Müller, Matthias, Nicolosi, Piergiorgio, Nardello, Marco, Guglielmina Pelizzo, Maria |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; May2013, Vol. 113 Issue 20, p203106, 6p, 1 Black and White Photograph, 2 Diagrams, 6 Charts, 6 Graphs |
| Abstrakt: |
Extreme ultraviolet Mo/Si multilayers protected by capping layers of different materials were exposed to 13.5 nm plasma source radiation generated with a table-top laser to study the irradiation damage mechanism. Morphology of single-shot damaged areas has been analyzed by means of atomic force microscopy. Threshold fluences were evaluated for each type of sample in order to determine the capability of the capping layer to protect the structure underneath. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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