Surface morphology study of titanium silicide formed on polycrystalline silicon.
| Autor: | Karlin, Tord E, Kaplan, Wlodek, Zhang, Shili |
|---|---|
| Zdroj: | Physica Scripta; 1994, Vol. 1994 Issue T54, p38-41, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Karlin, Tord E, Kaplan, Wlodek, Zhang, Shili |
|---|---|
| Zdroj: | Physica Scripta; 1994, Vol. 1994 Issue T54, p38-41, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|