The stress-induced escape of migrating aluminium from silicide interconnects.
| Autor: | Zehe, A |
|---|---|
| Zdroj: | Semiconductor Science & Technology; 2001, Vol. 16 Issue 10, p817-821, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Zehe, A |
|---|---|
| Zdroj: | Semiconductor Science & Technology; 2001, Vol. 16 Issue 10, p817-821, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|