Error analysis for a diffraction grating interferometric stylus probing system.

Autor:	Fan, Kuang-Chao, Su, Chung-De, Mou, Jong-I
Zdroj:	Measurement Science & Technology; 2001, Vol. 12 Issue 4, p482-490, 9p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu