Bi-directional fast flow sensor with a large dynamic range.
| Autor: | Bree, Hans-Elias de, Jansen, Henri V, Lammerink, Theo S J, Krijnen, Gijs J M, Elwenspoek, Miko |
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| Zdroj: | Journal of Micromechanics & Microengineering; 1999, Vol. 9 Issue 2, p186-189, 4p |
| Databáze: | Complementary Index |
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