Progress towards site-specific dopant profiling in the scanning electron microscope.

Autor: Jepson, M A E, Inkson, B J, Beanland, R, Chee, A K W, Humphreys, C J, Rodenburg, C
Zdroj: Journal of Physics: Conference Series; 2010, Vol. 209 Issue 1, p012068-012071, 4p
Databáze: Complementary Index