Plasma Enhanced Metal-Organic Chemical Vapor Deposition of Germanium Nitride Thin Films.
| Autor: | Hoffman, David M., Rangarajan, Sri Prakash, Athavale, Satish D., Economou, Demetre J., Liu, Jia-Rui, Zheng, Zongshuang, Chu, Wei-Kan |
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| Zdroj: | MRS Online Proceedings Library; 02/06/1993, Vol. 335, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
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