Study of Silicon Surface Roughness by Atomic Force Microscopy.

Autor:	Gilicinski, Andrew G., Rynders, Rebecca M., Beck, Scotjt E., Strausser, Yale E., Stets, James R., Felker, Brian S., Bohling, David A.
Zdroj:	MRS Online Proceedings Library; 01/27/1993, Vol. 324, pN.PAG-1, 1p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink