Adhesion of Cyclotene™ (BCB) Coatings on Silicon Substrates.
Autor: | Townsend, P. H., Schmidt, D., Stokich, T. M., Kisting, S., Burdeaux, D. C., Frye, D., Bernius, M., Lanka, M., Berry, K. |
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Zdroj: | MRS Online Proceedings Library; 01/26/1993, Vol. 323, pN.PAG-1, 1p |
Databáze: | Complementary Index |
Externí odkaz: |