Adhesion of Cyclotene™ (BCB) Coatings on Silicon Substrates.

Autor: Townsend, P. H., Schmidt, D., Stokich, T. M., Kisting, S., Burdeaux, D. C., Frye, D., Bernius, M., Lanka, M., Berry, K.
Zdroj: MRS Online Proceedings Library; 01/26/1993, Vol. 323, pN.PAG-1, 1p
Databáze: Complementary Index