Characterization of thin Chemical/Native Oxides on Si (100) by Auger and Angle-Resolved XPS.

Autor: Pylant, Eddie D., Hoener, Carolyn F., Arendt, Mark F., Witowski, Bob
Zdroj: MRS Online Proceedings Library; 01/21/1993, Vol. 318, pN.PAG-1, 1p
Databáze: Complementary Index
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