Amorphous Carbon as a Diffusion Barrier to Copper.
| Autor: | Purser, Richard G., Strane, Jay W., Mayer, James W. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 01/12/1993, Vol. 309, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Purser, Richard G., Strane, Jay W., Mayer, James W. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 01/12/1993, Vol. 309, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
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