Alternative Organometallic Precursors for CVD of Tungsten.
| Autor: | Kirss, Rein U., Gordon, Douglas, Kirlin, Peter S. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 02/24/1992, Vol. 282, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Kirss, Rein U., Gordon, Douglas, Kirlin, Peter S. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 02/24/1992, Vol. 282, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
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