Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators.
Autor: | Johnson, A. David, Busch, J. D., Ray, Curtis A., Sloan, Charles |
---|---|
Zdroj: | MRS Online Proceedings Library; 02/18/1992, Vol. 276, pN.PAG-1, 1p |
Databáze: | Complementary Index |
Externí odkaz: |