Formation of Defects During Ion-Assisted Growth of Thin Films from the Vapor Phase.
Autor: | Sundgren, J-E, Hultman, L, Håkansson, G, Birch, J, Petrov, I |
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Zdroj: | MRS Online Proceedings Library; 02/10/1992, Vol. 268, pN.PAG-1, 1p |
Databáze: | Complementary Index |
Externí odkaz: |