Formation of Defects During Ion-Assisted Growth of Thin Films from the Vapor Phase.

Autor: Sundgren, J-E, Hultman, L, Håkansson, G, Birch, J, Petrov, I
Zdroj: MRS Online Proceedings Library; 02/10/1992, Vol. 268, pN.PAG-1, 1p
Databáze: Complementary Index