Activation of Sb in Ultra-Shallow Poly-Silicon Emitters Using Rapid Thermal Processing.

Autor: Grelsson, Ö., Söderbärg, A., Magnusson, U., Olsson, J., Mohadjeri, B.
Zdroj: MRS Online Proceedings Library; 01/06/1991, Vol. 224, pN.PAG-1, 1p
Databáze: Complementary Index
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