Defect Reduction and Defect Engineering in Silicon-on-Sapphire Material Using Ge Implantation.
| Autor: | Namavar, F., Cortesi, E., Kalkhoran, N. M., Manke, J. M., Buchanan, B. L. |
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| Zdroj: | MRS Online Proceedings Library; 01/22/1990, Vol. 201, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
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