Characterization of a Rapid Thermal Annealed TiNxOy/TiSi2 Barrier Layer.
| Autor: | Chittipeddi, Sailesh, Kelly, Michael J., Dziuba, Charles M., Oates, Anthony S., Cochran, William T. |
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| Zdroj: | MRS Online Proceedings Library; 01/02/1990, Vol. 181, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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