Microstructural and Electronic Properties of Hydrogenated Amorphous Silicon Films Deposited by Magnetron Reactive Sputtering.

Autor:	Pinarbasi, Mustafa, Maley, Nagi, Myers, Alan, Szafranek, Igor, Abelson, John R., Thornton, John A.
Zdroj:	MRS Online Proceedings Library; 01/19/1988, Vol. 118, pN.PAG-1, 1p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink