Microstructural and Electronic Properties of Hydrogenated Amorphous Silicon Films Deposited by Magnetron Reactive Sputtering.
Autor: | Pinarbasi, Mustafa, Maley, Nagi, Myers, Alan, Szafranek, Igor, Abelson, John R., Thornton, John A. |
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Zdroj: | MRS Online Proceedings Library; 01/19/1988, Vol. 118, pN.PAG-1, 1p |
Databáze: | Complementary Index |
Externí odkaz: |