Formation of Double Layered SOI With Controlled Crystal Orientation.
| Autor: | Miyajima, Toshiaki, Tsuji, Hideyuki, Maekawa, Masashi, Koba, Masayoshi |
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| Zdroj: | MRS Online Proceedings Library; 01/08/1988, Vol. 107, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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