Short Time annealing of As and B Ion Implanted Si using Tungsten-Halogen Lamps.
| Autor: | Sedgwick, T. O., Kalish, R., Mader, S. R., Shatas, S. C. |
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| Zdroj: | MRS Online Proceedings Library; 01/11/1983, Vol. 23, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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