Wafer-Scale Laser Lithography: I. Pyrolytic Deposition Of Metal Microstructures.
| Autor: | Herman, Irving P., Hyde, Roderick A., Mcwilliams, Bruce M., Weisberg, Andrew H., Wood., Lowell L. |
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| Zdroj: | MRS Online Proceedings Library; 01/05/1983, Vol. 17, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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