Diffusion of Arsenic and Phosphorus in Laserprocessed-Polycrystalline-Silicon-Thin-Films.
Autor: | Baumgart, H., Leamy, H. J., Trimble, L. E., Doherty, C. J., Celler, G. K. |
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Zdroj: | MRS Online Proceedings Library; 01/02/1981, Vol. 5, pN.PAG-1, 1p |
Databáze: | Complementary Index |
Externí odkaz: |
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