Two critical thicknesses in the preferred orientation of TiN thin film.
Autor: | Oh, U. C., Je, Jung Ho, Lee, Jeong Y. |
---|---|
Zdroj: | Journal of Materials Research; 05/01/1998, Vol. 13 Issue 5, p1225-1229, 5p |
Databáze: | Complementary Index |
Externí odkaz: |