Sputtered amorphous carbon nitride films.
| Autor: | Kreider, K.G., Tarlov, M.J., Gillen, G.J., Poirier, G.E., Robins, L.H., Ives, L.K., Bowers, W.D., Marinenko, R.B., Smith, D.T. |
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| Zdroj: | Journal of Materials Research; 12/01/1995, Vol. 10 Issue 12, p3079-3083, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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