Hardness and Young's modulus of amorphous a-SiC thin films determined by nanoindentation and bulge tests.
| Autor: | El Khakani, M.A., Chaker, M., Jean, A., Boily, S., Kieffer, J.C., O'Hern, M.E., Ravet, M.F., Rousseaux, F. |
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| Zdroj: | Journal of Materials Research; 01/01/1994, Vol. 9 Issue 1, p96-103, 8p |
| Databáze: | Complementary Index |
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