The properties of thermal hillocks as a function of linewidth and process parameter in Al-on-chemical-vapor-deposited W films.
| Autor: | Pico, Carey A., Bonifield, Tom D. |
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| Zdroj: | Journal of Materials Research; 05/01/1993, Vol. 8 Issue 5, p1010-1018, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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