Grain growth in boron doped LPCVD polysilicon films.
| Autor: | Sitaram, A. R., Murarka, S. P., Sheng, T. T. |
|---|---|
| Zdroj: | Journal of Materials Research; 02/01/1990, Vol. 5 Issue 2, p360-364, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Sitaram, A. R., Murarka, S. P., Sheng, T. T. |
|---|---|
| Zdroj: | Journal of Materials Research; 02/01/1990, Vol. 5 Issue 2, p360-364, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
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