| Autor: |
Kline, Mitchell H., Yeh, Yu-Ching, Eminoglu, Burak, Najar, Hadi, Daneman, Mike, Horsley, David A., Boser, Bernhard E. |
| Zdroj: |
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS); 1/ 1/2013, p604-608, 5p |
| Abstrakt: |
A dual mass vibratory gyroscope sensor demonstrates the quadrature frequency modulated (QFM) operating mode, where the frequency of the circular orbit of a proof mass is measured to detect angular rate. In comparison to the mode-matched open loop rate mode, the QFM mode receives the same benefit of improved SNR but without the penalties of unreliable scale factor and decreased bandwidth. A matched pair of gyroscopes, integrated onto the same die, is used for temperature compensation, resulting in 6 ppb relative frequency tracking error, or an Allan deviation of 370 deg/hr with a 70 kHz resonant frequency. The integrated CMOS electronics achieve a capacitance resolution of 0.1 zF/rt-Hz with nominal 6 fF sense electrodes. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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