Autor: |
Tan, Zhichao, Chae, Youngcheol, Daamen, Roel, Humbert, Aurelie, Ponomarev, Youri V., Pertijs, Michiel A.P. |
Zdroj: |
2012 Symposium on VLSI Circuits (VLSIC); 1/ 1/2012, p24-25, 2p |
Abstrakt: |
A CMOS fully-integrated humidity sensor for a RFID sensor platform has been realized in 0.16µm CMOS technology. It consists of a top-metal finger capacitor, covered by a humidity-sensitive polyimide layer, and an energy-efficient inverter-based capacitance-to-digital converter (CDC). Measurements show that the CDC performs a 12.5-bit conversion in 0.8ms while consuming only 8.6µA from a 1.2V supply. Together with the co-integrated humidity sensor, this translates into a resolution of 0.05% RH in the range of 30% RH to 90% RH, at an energy consumption of only 8.3nJ per measurement. [ABSTRACT FROM PUBLISHER] |
Databáze: |
Complementary Index |
Externí odkaz: |
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