| Autor: |
Hui, H., Yakoubi, Y., Lenczner, M., Cogan, S., Meister, A., Favre, M., Couturier, R., Domas, S. |
| Zdroj: |
2012 Second Workshop on Design, Control & Software Implementation for Distributed MEMS; 1/ 1/2012, p46-52, 7p |
| Abstrakt: |
In this paper, we present new tools and results developed for Arrays of Microsystems and especially for Atomic Force Microscope (AFM) array design. For modeling, we developed a two-scale model of cantilever arrays in elasto dynamics. A robust optimization toolbox is interfaced to aid for design before the micro fabrication process. A model based algorithm of static state estimation using measurement of mechanical displacements by inter ferometry is stated. Quantization of inter ferometry data processing is analyzed for FPGA implementation. A robust H\infty filtering problem of the coupled cantilevers is solved for time invariant system with random noise effects. Our solution allows semi-decentralized computing based on functional calculus that can be implemented by networks of distributed electronic circuits as shown in a previous paper. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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