A novel software environment for design and simulation of piezoMEMS.

Autor: Cruau, A., Schropfer, G., Lorenz, G.
Zdroj: 2012 International Conference on Synthesis, Modeling, Analysis & Simulation Methods & Applications to Circuit Design (SMACD); 1/ 1/2012, p121-124, 4p
Abstrakt: This paper describes the use of a novel design and simulation platform for piezoMEMS devices and systems. This platform called MEMS+ is part of a complete environment where the seamless link to standard EDA and CAD tools enables complete and easy system simulation. The methodology is applied to two piezodevices examples, a unimorph cantilever energy harvester and a piston micromirror. [ABSTRACT FROM PUBLISHER]
Databáze: Complementary Index