Microfabricated all-around-electrode AC electroosmotic pump with simple design and increased velocity generation.

Autor: Ribetto, L., Homsy, A., de Rooij, N. F.
Zdroj: 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS); 1/ 1/2012, p1057-1060, 4p
Abstrakt: AC electroosmosis is a convenient valveless method to pump liquids, whilst avoiding electrolysis and gas generation. Basic designs presented in the literature often have limited velocity or pressure capabilities. This paper reports a simple approach to the design and fabrication of AC electroosmotic (ACEO) micropumps with electrodes that completely surround the channel. We present a fabrication process with two lithographic steps and show that the new prototypes allow for a dramatic increase of the velocity generation — up to 360% compared to devices where electrodes are placed only on one side of the channel. [ABSTRACT FROM PUBLISHER]
Databáze: Complementary Index