| Autor: |
Hamouda, Ayman Yehia, Anis, Mohab, Karim, Karim S. |
| Zdroj: |
2012 Design, Automation & Test in Europe Conference & Exhibition (DATE); 1/ 1/2012, p1603-1608, 6p |
| Abstrakt: |
In this paper, we present a novel methodology for identifying lithography hot-spots and automatically transforming them into the lithography-friendly design space. This fast model-based technique is applied at the mask tape-out stage by slightly shifting and resizing the designs. It implicitly does a similar functionality as that of the Process Window OPC (PWOPC) but more efficiently. Being a relatively fast technique it also offers the means of providing the designer with all the design systematic deviations from the actual (on-wafer) parameters by including it in the parameter-extraction flow. We applied this methodology successfully to 28-nm Metal levels and showed that it efficiently (better quality and faster) improves the lithography-related yield and reliability issues. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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