Micro and Nano R&D Fab Safety, Inert Gas Reduction: A Lean Six-Sigma Approach.
| Autor: | Olson Jr., R. J., Frank, R., Benyeda, J., Labrie, J., McConnelee, P. A. |
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| Zdroj: | 2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM); 1/ 1/2012, p1-1, 1p |
| Abstrakt: | NA [ABSTRACT FROM PUBLISHER] |
| Databáze: | Complementary Index |
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