Fabrication and characterization of a waveguide with a horizontal air slot for optical trapping.
| Autor: | Kim, In Yong, Koh, Joonyoung, Shin, Jung H. |
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| Zdroj: | 2012 17th Opto-Electronics & Communications Conference; 1/ 1/2012, p95-96, 2p |
| Abstrakt: | We have investigated a silicon nitride waveguide with a horizontal air slot which is integrated with SU8 fluidic channel. Formation of air slot is performed in SU8 channel by selective wet etching between SiNx and SiO2. [ABSTRACT FROM PUBLISHER] |
| Databáze: | Complementary Index |
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