High precision positioning of plasmonic nanoparticle based on damascene process.

Autor: Haringer, Daniel, Chen, Gang, Jakobs, Peter, Yarema, Maksym, Heiss, Wolfgang, Kohl, Manfred
Zdroj: 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO); 1/ 1/2012, p1-4, 4p
Abstrakt: Nanoparticle positioning by a silicon pore array template with decreasing pore diameter down to 16 nm opens up a new way of fabrication of metal nanostructures based on high precision dry etching of silicon. We demonstrate how this process can be used to fabricate plasmonic nano-structures. Plasmonic dipole structures are presented with variable gap size below 20 nm. [ABSTRACT FROM PUBLISHER]
Databáze: Complementary Index