Effects of implant spacer on InP-based self-aligned pseudomorphic SIGFETs.
| Autor: | Chen, C.L., Mahoney, L.J., Calawa, S.D., Molvar, K.M. |
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| Zdroj: | Electronics Letters (Institution of Engineering & Technology); 04/29/1999, Vol. 35 Issue 9, p746-748, 3p |
| Databáze: | Complementary Index |
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