Damage induced in p-GaAs due to RIE in CH4/H2 mixture.
| Autor: | Sahafi, H.F., Goldspink, G.F., Rezazadeh, A.A., Webb, A.P., Carter, M.A. |
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| Zdroj: | Electronics Letters (Institution of Engineering & Technology); 12/03/1992, Vol. 28 Issue 25, p2300-2302, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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