High-resolution infrared spectroscopy of etching plasmas.
Autor: | Haverlag, M, Stoffels, W W, Stoffels, E, Boer, J H W G den, Kroesen, G M W, Hoog, F J de |
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Zdroj: | Plasma Sources Science & Technology; 1995, Vol. 4 Issue 2, p260-267, 8p |
Databáze: | Complementary Index |
Externí odkaz: |