High-resolution infrared spectroscopy of etching plasmas.

Autor: Haverlag, M, Stoffels, W W, Stoffels, E, Boer, J H W G den, Kroesen, G M W, Hoog, F J de
Zdroj: Plasma Sources Science & Technology; 1995, Vol. 4 Issue 2, p260-267, 8p
Databáze: Complementary Index