Study of Characteristics of the Radio-Frequency Sheath over a Substrate with a Circular Trench.
| Autor: | Zhongling, Dai, Meilan, Hao, Younian, Wang |
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| Zdroj: | Plasma Science & Technology; Feb2011, Vol. 13 Issue 1, p50-54, 5p |
| Databáze: | Complementary Index |
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