Electroless Nickel Films: Properties and Fabricated Cavity Structure.
| Autor: | Seung Hwan Yi, von Preissig, Fred J., Eun Sok Kim |
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| Zdroj: | Journal of Microelectromechanical Systems; Aug2002, Vol. 11 Issue 4, p293, 9p, 8 Black and White Photographs, 3 Diagrams, 8 Graphs |
| Abstrakt: | Studies the properties and fabricated cavity structure of electroless nickel films. Residual mechanical stress at room temperature; Growth rate of the films; Crystallinity and phosphorus content. |
| Databáze: | Complementary Index |
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