New algorithm for overlapping cell treatment in hierarchical CAD data/electron beam exposure data conversion.
Autor: | Okubo, Tsuneo, Watanabe, Takashi, Wada, Kou |
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Zdroj: | Proceedings of the 27th ACM/IEEE Design Automation Conference; Jun1990, p321-326, 6p |
Databáze: | Complementary Index |
Externí odkaz: |