Subwavelength optical lithography.
| Autor: | Kahng, A. B., Pati, Y. C. |
|---|---|
| Zdroj: | Proceedings of the 1999 International Symposium: Physical Design; 4/12/1999, p112-119, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Kahng, A. B., Pati, Y. C. |
|---|---|
| Zdroj: | Proceedings of the 1999 International Symposium: Physical Design; 4/12/1999, p112-119, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|