High performance lithographic hotspot detection using hierarchically refined machine learning.
Autor: | Ding, Duo, Torres, Andres J., Pikus, Fedor G., Pan, David Z. |
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Zdroj: | Proceedings of the 16th Asia & South Pacific Design Automation Conference; 1/25/2011, p775-780, 6p |
Databáze: | Complementary Index |
Externí odkaz: |